BL50H Laserscale - High resolution and accuarcy linear encoder with very small dimensions for easy integration
Principle: Reflection type laser grating interferometer
Grating pitch: 1,6 µm
Signal pitch: 400nm
Accuarcy: ±0,5µm for ML:120mm
Measuring lengths: 30mm - 640mm
Max. response speed: 3 m/s
Max. Resolution: 3,8 pm with BD700
Reference point: one
Interface: 1Vpp, TTL, BISS-C
Glass or low expansion glass
Support a wide range of applications and offers the highest performance. Ideal for precision stages, semiconductor inspection systems, ultra precision cutting machines and liquid crystal manufacturing equipment.